Patent · US Expired

Method and apparatus for light-induced scanning-microscope display of specimen parameters and of their distribution

US4407008A · kind A · utility

176Cited by

2References

27Claims

0Family size

Assignee

Carl Zeiss Stiftung · DE

Inventors

Werner Schmidt · Chemnitz, DE
Gerhard Mueller · Aalen, DE
Klaus Weber · North Canberra, AU
Volker Wilke · Aalen, DE

Key dates

Filing date	Oct 7, 1981
Grant date	Sep 27, 1983
Priority date	—
Expiry date	Oct 7, 2001

Classification

Technology area (CPC G)Physics
CPC primaryG01N21/6458
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The invention contemplates scanning-microscope display of plural observed parameters of an examined specimen, where the parameters derive from flying-spot light-exposure of the specimen, and where at least one of the observed parameters is outside the wavelength range of the flying-spot. In some illustrative embodiments, at least one of the observed parameters is sensed by a detector which uses the same scanning optics as the flying-spot, and in other embodiments other techniques of synchronization are involved. The disclosed embodiments also provide for selective arrest of scanning to enable such factors as fading fluorescence and spectrum analysis to be ascertained strictly for a surface occlusion, impurity or other anomaly of interest.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.