Natural lithographic fabrication of microstructures over large areas
US4407695A · kind A · utility
138Cited by
2References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 29, 1982 |
| Grant date | Oct 4, 1983 |
| Priority date | — |
| Expiry date | Mar 29, 2002 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/3081
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Large area random and mosaic arrays of identical submicron microcolumnar structures can be produced on surfaces by directionally ion etching a monolayer film of spherical colloidal particles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.