Vacuum ultraviolet reflectance filter
US4408825A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Nov 10, 1980 |
| Grant date | Oct 11, 1983 |
| Priority date | — |
| Expiry date | Nov 10, 2000 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/285
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A reflector which particularly reflects light at a selected peak wavelength in the vacuum ultraviolet (VUV) region and which absorbs light outside the VUV, particularly in the visible light region consists of a reflective surfaced substrate such as polished aluminum, a dielectric layer over the reflective surface, and a thin film of one or more of the six, non-radioactive metals tungsten, rhenium, osmium, iridium, platinum and gold. The thickness of the dielectric spacer layer is approximately one fifth that of the selected peak wavelength, and a second dielectric layer of the same thickness may be applied over the metallic thin film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.