Projection aligner with specific means for bending mirror
US4408874A · kind A · utility
26Cited by
12References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 7, 1981 |
| Grant date | Oct 11, 1983 |
| Priority date | — |
| Expiry date | May 7, 2001 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F9/70
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A projection aligner is provided wherein anamorphic metric distortion can be introduced in the projection image by employing a bending mirror that makes a slight change in magnification along one axis of the image. In one embodiment of the invention a pneumatic bending mechanism is employed and in another embodiment, a mechanical system is employed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.