Apparatus for precisely moving a table
US4409860A · kind A · utility
104Cited by
12References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 7, 1980 |
| Grant date | Oct 18, 1983 |
| Priority date | — |
| Expiry date | Apr 7, 2000 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/20354
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
In an apparatus for precisely moving a table, rectilinear drive systems for both X- and Y-axes are fixed to a support frame, a movable stage is constructed so as to have its motion in the direction of one of these axes constrained by the motion of the rectilinear drive system for the one axis and to have its motion in the direction of the other axis constrained by the rectilinear motion of the rectilinear drive system for the other axis, and means for coupling the rectilinear drive system for at least one of the axes and the movable stage so as to have a backlash.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.