Method of fabrication of Josephson tunnel junction

US4412902A · kind A · utility

Assignee

• Nippon Telegraph and Telephone Public Corporation · JP

Inventors

• Osamu Michikami · Võru, EE
• Yujiro Katoh
• Keiichi Tanabe · Mito, JP
• Hisataka Takenaka · Tokyo, JP
• Shizuka Yoshii · Ibaraki, JP

Key dates

• Filing date: Jun 18, 1982
• Grant date: Nov 1, 1983
• Expiry date: Jun 18, 2002

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S505/817

Abstract

There is disclosed a method of fabrication of a Josephson tunnel junction device. A surface of a base electrode of Nb or Nb compound is subjected to sputter cleaning and then to plasma oxidation in an atmosphere of a diluent gas and oxygen to form thereon an oxide layer serving as a tunnel barrier. A counter electrode is then formed on the oxide layer to provide the Josephson tunnel junction.