Magnetically-assisted sputtering method for producing vertical recording media
US4414087A · kind A · utility
16Cited by
6References
5Claims
0Family size
Inventor
Key dates
| Filing date | Jan 31, 1983 |
| Grant date | Nov 8, 1983 |
| Priority date | — |
| Expiry date | Jan 31, 2003 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3497
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Disclosed is a method for producing vertical recording media by using magnetically-assisted sputtering apparatus to sputter from a magnetic target while selected portions of the target are heated to a temperature at or above Curie. Also disclosed are improved means for supporting the magnetic target during sputtering which permits the realization of enhanced sputtering efficiencies.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.