Ion sputter textured graphite electrode plates
US4417175A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 31, 1982 |
| Grant date | Nov 22, 1983 |
| Priority date | — |
| Expiry date | Mar 31, 2002 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J25/02
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A specially textured surface of pyrolytic graphite exhibits extremely low yields of secondary electrons and reduced numbers of reflected primary electrons after impingement of high energy primary electrons. Electrode plates of this material are used in multistage depressed collectors. An ion flux having an energy between 500 eV and 1000 eV and a current density between 1.0 mA/cm.sup.2 and 6.0 mA/cm.sup.2 produces surface roughening or texturing which is in the form of needles or spires. Such textured surfaces are especially useful as anode collector plates in high efficiency electron tube devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.