Vapor-phase axial deposition torch
US4417692A · kind A · utility
3Cited by
12References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 26, 1982 |
| Grant date | Nov 29, 1983 |
| Priority date | — |
| Expiry date | Apr 26, 2002 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03B2207/42
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
A reactant deposition torch (10) has a plurality of concentric glass tubes (16, 18, 20, 24 and 26). Various gases pass through the tubes (18, 20, 24 and 26) while particle producing reactants pass through the inner tube (16). The concentricity of the tubes is accurately maintained by a plurality of precision machined splines located on the outer periphery of the inner and intermediate tubes (16, 18, 20 and 24). Additionally, the inner tube (16) is movable in the axial direction during the deposition process to controllably alter the amount of reactant to be deposited.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.