Glow discharge apparatus with squirrel cage electrode
US4418645A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Mar 26, 1982 |
| Grant date | Dec 6, 1983 |
| Priority date | — |
| Expiry date | Mar 26, 2002 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In an r.f. glow discharge system, a plurality of hollow electrodes are positioned circumferentially about a central point forming a circular array or squirrel cage. A workpiece is supported within the squirrel cage and relative rotational movement between the squirrel cage and the workpiece is provided. A plurality of apertures are provided along the surface of each electrode and aligned toward the surface of the workpiece. Alternatively, each electrode may further consist of a pair of inner and outer hollow tubes each with a plurality of apertures along its length with the apertures of the inner tube being adjacent to and spaced from the apertures of the outer tube but offset therefrom. The arrangement is best suited for a cylindrically shaped workpiece, e.g., a photoreceptor drum.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.