Method for ion-aided coating on electrically insulating substrates

US4419380A · kind A · utility

Assignee

• VEB Hochvakuum Dresden · DE

Inventors

• Helmut Bollinger · Dresden, DE
• Bernd Bucken · Dresden, DE
• Dietmar Schulze · Kandern, DE
• Rudiger Wilberg · Dresden, DE

Key dates

• Filing date: Nov 3, 1981
• Grant date: Dec 6, 1983
• Expiry date: Nov 3, 2001

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C16/509
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

The present invention is directed to coating low-conductive or non-conductive materials in a vacuum, such as coating electrically-insulating substrates, by operating a plasma source comprising a thermionic cathode and anode with the anode-voltage continuously alternating between an ignition voltage U.sub.Z and an extinction voltage U.sub.L at a frequency of between several kHz and several hundred kHz, the thermionic cathode continuously emitting electrons.