Piezo-electric travelling support
US4422002A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 9, 1982 |
| Grant date | Dec 20, 1983 |
| Priority date | — |
| Expiry date | Aug 9, 2002 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N2/101
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The travelling support (1) comprises a piezo-electric plate (2) resting on three legs (6) whose bottom surface is insulated from the bench (8) on which the support is to travel, by a dielectric (7). The piezo-electric plate (2) can be caused to contract by means of an actuating voltage applied via sliders (9, 10) to top and bottom electrodes on the plate (2). By applying a voltage to the legs (6), these may be clamped selectively by electrostatic forces effective across the dielectric (7). Appropriate control of the actuating and clamping voltages causes the support (1) to either move in a linear or rotary fashion. The displacements the support can perform per step are in the nanometer range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.