Apparatus for treating powdery materials utilizing microwave plasma
US4423303A · kind A · utility
48Cited by
7References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 5, 1981 |
| Grant date | Dec 27, 1983 |
| Priority date | — |
| Expiry date | May 5, 2001 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P20/10
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The apparatus includes a microwave generating device and, a waveguide connected with the microwave generating device. A reaction vessel disposed through the waveguide and supplied with a powdery material to be treated with a reaction gas. Pumps are provided for exhausting the reaction vessel. The reaction vessel comprises a vertically elongated vessel having a bottom above which a plasma generating area is formed. In one embodiment, the reaction vessel further comprises a bottom plate horizontally supported in the reaction tube and connected so as to be vertically slidable within the reaction tube.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.