Transparent conductive films and methods of producing same
US4423403A · kind A · utility
3Cited by
1References
8Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Apr 16, 1982 |
| Grant date | Dec 27, 1983 |
| Priority date | — |
| Expiry date | Apr 16, 2002 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01B1/08
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Cadmium-tin oxide films are prepared by d-c reactive sputtering of Cd-Sn alloys in Ar-O.sub.2 mixtures. The films obtained have low resistivity of the order of 10.sup.-3 -10.sup.-4 .OMEGA.-cm and high optical transparency depending upon deposition conditions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.