Method and apparatus for forming electrically conductive transparent oxide

US4428809A · kind A · utility

Assignee

• Leybold-Heraeus GmbH · DE

Inventors

• Klaus-Jurgen Heimbach · Hattersheim, DE
• Wolf-Dieter Munz · Somborn, DE
• Rolf Adam · Hanau, DE
• Heinz Wenzl · Albstadt, DE

Key dates

• Filing date: Mar 26, 1982
• Grant date: Jan 31, 1984
• Expiry date: Mar 26, 2002

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C14/0068
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

The invention concerns a method of and apparatus for forming electrically conductive transparent oxide coatings on water-containing substrates by magnetic-field reinforced cathodic atomization of a target hot-pressed from powdered oxide ceramic materials. The coatings formed have electrical conductivity. When the atomization process is carried out using direct-current voltages of between 150 and 600 volts and a power density of 3 to 15 and preferably 5 to 10 watts/cm.sup.2, the degree of pressing of the target is at least 75% of the density of the solid material and the atomization atmosphere is maintained at between 1.times.10.sup.-3 and 5.times.10.sup.-2 mbars with a composition of 2 to 20% oxygen, 40 to 70% hydrogen, and the remainder argon. Based upon the speed of travel of the web, a thickness of coating of between 10 and 100 mm and a specific resistance of between 100 and 10,000 .mu..OMEGA.cm are achieved.