Stripping compositions and methods of stripping resists
US4428871A · kind A · utility
45Cited by
6References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 17, 1982 |
| Grant date | Jan 31, 1984 |
| Priority date | — |
| Expiry date | Aug 17, 2002 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/425
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Stripping compositions for removing resist materials from substrates comprise compositions of a 2-pyrrolidinone compound and a diethylene glycol monoalkyl ether compound. Polyethylene glycol may be added to provide even more effective stripping compositions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.