Method of making coherent multilayer crystals
US4430183A · kind A · utility
9Cited by
2References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 27, 1982 |
| Grant date | Feb 7, 1984 |
| Priority date | — |
| Expiry date | Sep 27, 2002 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S505/731
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A new material consisting of a coherent multilayer crystal of two or more elements where each layer is composed of a single element. Each layer may vary in thickness from about 2 .ANG. to 2500 .ANG.. The multilayer crystals are prepared by sputter deposition under conditions which slow the sputtered atoms to near substrate temperatures before they contact the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.