Annealed CVD molybdenum thin film surface
US4431708A · kind A · utility
20Cited by
5References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 19, 1979 |
| Grant date | Feb 14, 1984 |
| Priority date | — |
| Expiry date | Dec 19, 1999 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/12826
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
Molybdenum thin films deposited by pyrolytic decomposition of Mo(CO).sub.6 attain, after anneal in a reducing atmosphere at temperatures greater than 700.degree. C., infrared reflectance values greater than reflectance of supersmooth bulk molybdenum. Black molybdenum films deposited under oxidizing conditions and annealed, when covered with an anti-reflecting coating, approach the ideal solar collector characteristic of visible light absorber and infrared energy reflector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.