Moisture sensor and method of manufacturing the same

US4433319A · kind A · utility

Assignee

• Endress u Hauser GmbH u Co. · DE

Inventors

• Ernst Luder · Stuttgart, DE
• Traugott Kallfass · Bornsteiner Straße, DE

Key dates

• Filing date: Jun 9, 1981
• Grant date: Feb 21, 1984
• Expiry date: Jun 9, 2001

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N27/225
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A moisture sensor including a thin layer of tantalum oxide applied to a moisture insensitive substrate and at least two electrodes placed on the tantalum oxide layer spaced apart from each other wherein the tantalum oxide layer comprises the oxide of a highly resistive low density tantalum where the tantalum in the layer applied to the substrate has a density of less than 15 g/cm.sup.3.