Pressure transducer of the vibrating element type
US4435986A · kind A · utility
17Cited by
1References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 9, 1981 |
| Grant date | Mar 13, 1984 |
| Priority date | — |
| Expiry date | Nov 9, 2001 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0022
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
44A pressure transducer which uses the principle of a variation in the resonance frequency of a membrane when it is subjected to a variable pressure. The transducer comprises a vibrating membrane which is fixed on a support member forming a cavity, and a cover member forming a second cavity. Excitation of the membrane is facilitated since it is made of a piezoelectric material and is provided with electrodes. An object of the invention is to provide a digital output pressure transducer which can be minaturized and which has low power consumption.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.