Gas flow controller
US4437489A · kind A · utility
6Cited by
1References
4Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 24, 1981 |
| Grant date | Mar 20, 1984 |
| Priority date | — |
| Expiry date | Dec 24, 2001 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/8326
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A flow controller having a volume, a pressure transducer coupled to said volume, a first valve coupled between a source of gas under pressure and said volume, a second valve coupled between said volume and a reference volume, a third valve coupled between said reference volume and a load wherein said valves are cyclically operated so as to permit gas to flow through said volumes to a load and wherein maximum and minimum pressures are measured with said first and second valves closed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.