Copper plating procedure
US4437948A · kind A · utility
10Cited by
10References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 16, 1981 |
| Grant date | Mar 20, 1984 |
| Priority date | — |
| Expiry date | Oct 16, 2001 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC25D3/38
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A process is described for the electrodepositon of copper on various surfaces. The process involves use of a nonconsumable counterelectrode. Of particular significance is the composition of the surface of the counterelectrode. The surface of the counterelectrode comprises iridium oxide and tantalum oxide. Such processes can be carried out at high speeds, with smaller and more efficient equipment and can use various copper compounds as a source of copper.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.