Means for periodic desorption of a cryopump
US4438632A · kind A · utility
37Cited by
12References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 6, 1982 |
| Grant date | Mar 27, 1984 |
| Priority date | — |
| Expiry date | Jul 6, 2002 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S417/901
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
The invention discloses a cryopump comprising a primary cryopanel 67 associated with a low temperature heat sink 60 having means for adsorbing a first low boiling point gas and a secondary cryopanel 80 associated with heat sink 60 and a higher temperature heat sink 48 having means for condensing a higher boiling point gas. There are means 90 for selectively conducting heat to the primary cryopanel to raise the temperature of the cryopanel above that which is necessary to cause said first gas to become desorbed from said cryopanel while having minimal effect on the capacity of the higher temperature heat sink.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.