Semiconductor pressure transducer
US4439752A · kind A · utility
12Cited by
3References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 26, 1981 |
| Grant date | Mar 27, 1984 |
| Priority date | — |
| Expiry date | Oct 26, 2001 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0054
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A transducer for sensing pressure, wherein the transducer is formed of a single crystal semiconductor square chip having piezoresistive stress sensors disposed on one surface thereof and a cavity formed in the opposite surface, and wherein one of the edges of the chip is oriented at an angle of substantially 22.5.degree. with respect to a <110> crystal direction of the chip.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.