Deformable mirror light modulator
US4441791A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jun 7, 1982 |
| Grant date | Apr 10, 1984 |
| Priority date | — |
| Expiry date | Jun 7, 2002 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/0128
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A light modulator comprising a light-reflective metallized membrane defining a deformable mirror disposed over a semiconductor substrate of one conductivity type in which a matrix array of field effect address transistors are formed, the metallized membrane cooperating with a matrix of floating metallic field plate members disposed on an insulating layer covering the substrate to define an array of air gap capacitors for line addressing by the field effect address transistors. The floating metallic field plates are opaque to light and prevent photocharge generation in the active regions of the matrix array of field effect address transistors. The metallized membrane is spaced from the field effect address transistors and the metallic floating field plates by an upstanding semiconductor grid structure which is formed on the insulating layer of the semiconductor substrate and defines gate electrodes for the address transistors. The metallized membrane is mounted on the upstanding semiconductor grid structure by molecular bonding to the contact members disposed over the semiconductor grid structure. The metallized membrane is formed of a polymer of nitrocellulose as a flexible carrier…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.