Sputter initiated resonance ionization spectrometry
US4442354A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 22, 1982 |
| Grant date | Apr 10, 1984 |
| Priority date | — |
| Expiry date | Jan 22, 2002 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/142
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Apparatus and method are described for the quantitative analysis of a specific specie within a sample. The analysis has sufficient sensitivity for the detection of as little as one atom of the desired species. The method is accomplished by bombarding a sample with a highly focused charged particle beam; for example, a beam of positive argon ions having an energy from five to thirty kilovolts and a current of one milliampere or greater. This beam impinging upon the sample creates a cloud including secondary ions and neutral particles of the constituents of the sample. The cloud is irradiated with a laser beam having selected wavelengths therein for the unique ionization of the desired specie by means of resonance ionization spectroscopy (RIS). In most applications some energy and/or mass discrimination is required. The energy discrimination can be accomplished by passing the RIS ions through an energy filter, with the ions emanating therefrom having a narrow range of energy. Then, if desired, a mass discrimination may be accomplished in an appropriate mass analyzer such as a time of flight spectrometer, an r.f. quadrupole mass spectrometer or a magnetic sector mass spectrometer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.