Multiple range capacitive pressure transducer
US4445383A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 18, 1982 |
| Grant date | May 1, 1984 |
| Priority date | — |
| Expiry date | Jun 18, 2002 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0073
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There is provided a multirange, variable capacitance pressure transducer by bonding a diaphragm plate that is conductive between a pair of insulating plates with the diaphragm plate having a plurality of cavities provided on each side so that diaphragm deflection areas of different sizes are defined. The surfaces of the pair of plates in the cavities are covered by a conductive coating so that the coatings form capacitors with the deflection areas. A fluid communication path is provided to each cavity so that the pressure difference to be measured is placed across the deflection area. Electrical connection is made to selective combinations of said capacitors to provide pressure transducers for a number of ranges in one unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.