Surface treatment for ceramics to eliminate alpha particle emitting elements
US4445968A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 14, 1983 |
| Grant date | May 1, 1984 |
| Priority date | — |
| Expiry date | Jul 14, 2003 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A method of treating ceramic materials used in semiconductor packaging applications to reduce their emission of alpha particles. Ceramic materials made of aluminum oxide particles bonded together with a siliceous binding material, are etched to remove the siliceous material from a surface portion of the ceramic. Since the typically used siliceous materials have alpha particle emitting elements in them by removing this siliceous material from a surface layer of the ceramic material the sources of alpha particles which are most likely to cause failures in electronic devices are removed. Alpha particle sources deeper in the ceramic pose a far lesser threat to the device because these relatively low energy, high volume particles suffer a substantial attenuation as they pass through aluminum oxide particles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.