Multiport cryopump
US4446702A · kind A · utility
17Cited by
2References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 14, 1983 |
| Grant date | May 8, 1984 |
| Priority date | — |
| Expiry date | Feb 14, 2003 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S417/901
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A cryopump installation in which a novel cryopump 20 maintains a work chamber 12 at continuous high vacuum while periodically evacuating a load lock 14 in order to allow transfer of material from the load lock 14 to the work chamber 12 without disruption of the work chamber environment. The cryopump has pumping ports 46 positioned on the radiation shield 50 in order to pump plenum 72 to a high vacuum. Load lock gases enter the cryopump through port 46 and are condensed and adsorbed by the radiation shield 50 and second stage cryopanel 54.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.