Precision drive system
US4447770A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jan 26, 1981 |
| Grant date | May 8, 1984 |
| Priority date | — |
| Expiry date | Jan 26, 2001 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D3/18
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A precision drive system including a base plate; track means and an air bearing means movable relative to one another, one of the means being fixed to the base plate and the other being movable for carrying an object to be moved relative to the base plate; means for moving one of the track and air bearing means; means for driving the moving means; and a control circuit including a power circuit for operating the means for driving; a velocity sensor for detecting the velocity of the movable one of the track and air bearing means, and a velocity feedback circuit for introducing velocity error signals into the power circuit to correct velocity; a position sensor to detect the position of the movable one of the track and air bearing means and a position feedback circuit for introducing position error signals into the power circuit to correct position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.