Apparatus for removably mounting and supplying mechanical and electrical energy to a vacuum chamber substrate holder
US4448149A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 12, 1982 |
| Grant date | May 15, 1984 |
| Priority date | — |
| Expiry date | Oct 12, 2002 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/18
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Briefly, the apparatus in accordance with this invention features an energy coaxial feedthrough fix-mounted in the wall of the vacuum chamber for supplying electrical and mechanical energy from sources located externally of the vacuum chamber to within the vacuum chamber. Additionally, the apparatus includes a movable coaxial coupler capable of releasably engaging the coaxial feedthrough and additionally releasably latching a substrate holder. Finally, the apparatus includes a linkage assembly located within the chamber connected to the coupler so that the coupler may be located in a first position proximate an access port in the chamber wall to facilitate quick and convenient loading of a substrate holder and a second position in which the coupler may be connected to the feedthrough for uniformly transmitting electrical and mechanical energy to the substrate holder and the substrates thereon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.