Wafer transfer system
US4449885A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 24, 1982 |
| Grant date | May 22, 1984 |
| Priority date | — |
| Expiry date | May 24, 2002 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/14
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A system for the automated transfer of semiconductor wafers between a cassette and a wafer processing chamber. Included in the system are a cassette conveyor assembly, a wafer transfer assembly and a wafer handling assembly associated with the entrance to the processing chamber. Wafers of any standard size can be accommodated by the system. The cassette conveyor assembly includes a cassette holder which retains and precisely positions two standard plastic cassettes. The cassette holder is positioned by a ball reverser driven by a motor and a mechanical stepper. The wafer transfer assembly includes an elevator blade which vertically raises and lowers wafers to and from the wafer handling assembly. The elevator blade is actuated by a crank driven by a motor and a mechanical stepper. The crank provides a high rate of wafer transfer and a low risk of wafer damage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.