Patent · US Expired

Beam alignment tool and method

US4452532A · kind A · utility

42Cited by
3References
17Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 18, 1980
Grant dateJun 5, 1984
Priority date
Expiry dateJun 18, 2000

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01B11/27
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A method and apparatus for adjusting the alignment of a beam of radiant energy relative to a structure. A target is placed in the path of the beam, with an opaque reticle disposed in front of the target in the path of the beam in predetermined alignment with the structure. The beam impinges on the target to form a beam image and the reticle casts a shadow within the beam image. The positional relationship between the shadow and the outline of the beam image will be altered by any misalignment between the beam and the structure. The target is preferably chosen so that it will be permanently altered by the radiant energy of the beam, and the positional relationship between the shadow and the outline is preferably observed after exposure of the target to the beam.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.