Fixture for testing semiconductor devices
US4460868A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 16, 1981 |
| Grant date | Jul 17, 1984 |
| Priority date | — |
| Expiry date | Nov 16, 2001 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2886
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The preferred embodiment of the invention disclosed herein relates to an apparatus for testing semiconductor devices on a wafer containing a plurality of such devices. The apparatus includes a base having a support surface on which the semiconductor wafers can be located. The base further includes heater means for heating the surface and, thus, any wafers located thereon. Support stand means is associated with the base and extends above the support surface and a test probe unit connected in an electric test circuit is adjustably mounted on the support plate so that the probe unit is normal to and movable relative to the surface. Preferably, the test probe includes a tip that engages the wafer and this tip does not rotate when the position of the probe unit is adjusted.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.