Humidity sensor made of metal oxide
US4464647A · kind A · utility
9Cited by
3References
7Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Jan 25, 1982 |
| Grant date | Aug 7, 1984 |
| Priority date | — |
| Expiry date | Jan 25, 2002 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/121
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sintered body for a humidity sensor is formed by baking a blend at 1,000.degree. to 1,400.degree. C., the blend comprising ZnO, Cr.sub.2 O.sub.3, V.sub.2 O.sub.5 and M.sub.2 O where M.sub.2 O is at least one metal oxide selected from Li.sub.2 O, Na.sub.2 O and K.sub.2 O. A pair of electrodes are each attached to the corresponding surface of the sintered body to obtain a humidity sensor of metal oxide which is relatively low in its resistive value and stable in its aging characteristic.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.