Ebulliometric hot spot detector
US4466746A · kind A · utility
13Cited by
4References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 1, 1981 |
| Grant date | Aug 21, 1984 |
| Priority date | — |
| Expiry date | Dec 1, 2001 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N25/72
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An ebulliometric hot spot detector detects hot spots with a resolution of the order of a micron on semiconductor devices. The device to be tested is operated in a suitable liquid contained in the detector, and the liquid pressure is decreased until boiling from sites on the device is observed. The liquid pressure is then increased until boiling ceases; meanwhile, the boiling sites on the device are observed. Small bubbles observed just before cessation of boiling pinpoint the hot spot locations. The pressure at which boiling ceases in a given liquid determines the hot spot temperature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.