Multicomponent alloy for sputtering targets

US4466940A · kind A · utility

Assignees

• Demetron Gesellschaft fuer Elektronik-Werkstoffe m.b.H. · DE
• Leybold-Heraeus GmbH · DE

Inventors

• G. A. Horst Siewert · Alzenau, DE
• Horst Dietrich · Bad Orb, DE
• Wolf-Dieter Munz · Somborn, DE
• Jorg Goebel · Alzenau, DE

Key dates

• Filing date: Aug 9, 1982
• Grant date: Aug 21, 1984
• Expiry date: Aug 9, 2002

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C22C5/02
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

A multicomponent alloy for targets employed in the sputter coating of gold layers, said alloy having 35% to 55%, preferably either 50% or 42%, non-aurous alloy components.