Surface acoustic wave interferometer
US4467235A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 12, 1982 |
| Grant date | Aug 21, 1984 |
| Priority date | — |
| Expiry date | Mar 12, 2002 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L1/165
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is a surface acoustic wave interferometer, including a substrate on which are disposed a first reflector and a second reflector so as to define a multimode resonant cavity therebetween. A third reflector is positioned on the substrate so that a single mode resonant cavity is defined between the second and third reflectors. An input transducer generates surface acoustic waves in the single mode cavity, while an output transducer detects the interference between surface acoustic waves in the multimode and single mode cavities. A base is rigidly affixed to the substrate in the region of the single mode cavity so that a force applied to the substrate will alter the surface acoustic wave propagation characteristics within the multimode cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.