Electron microscope equipped with measuring facility
US4468560A · kind A · utility
2Cited by
5References
11Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Feb 11, 1982 |
| Grant date | Aug 28, 1984 |
| Priority date | — |
| Expiry date | Feb 11, 2002 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Electron microscope imparted with measuring functions comprises an electron microscope system for forming an electron-microscopic image, a fluorescent screen for displaying the electron-microscopic image, and an optical microscope for observing the electron-microscopic image on the fluorescent screen. A pattern which provides convenience for measurements of the electron-microscopic image is imaged on an object plane of an eyepiece of the optical microscope.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.