Gas chromatography system and detector and method
US4471647A · kind A · utility
53Cited by
7References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 22, 1982 |
| Grant date | Sep 18, 1984 |
| Priority date | — |
| Expiry date | Mar 22, 2002 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N30/88
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There is described a gas chromatographic assembly formed on a semiconductor wafer by etching techniques. There is also described an improved thermal detector for use therewith.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.