Wafer carrier
US4471716A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Aug 20, 1982 |
| Grant date | Sep 18, 1984 |
| Priority date | — |
| Expiry date | Aug 20, 2002 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S206/833
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A PFA Teflon carrier for silicon wafers being processed in hot baths in the production of integrated circuit chips with sidewalls having wafer spacing webs and grooves receiving the wafers in confronting and spaced relation. The sidewalls having outboard channel supports or stiffening bars extending substantially to the ends of the sidewalls and adjacent offsets in the sidewalls which connect to the end walls of the receptacle, one end wall being H-shaped and having a cross bar panel with elongate parallel stiffener bars thereon at the level of the bottom edge of the wafer confining panels in the sidewalls, the stiffener bars in the end walls having their ends spaced from the sidewalls.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.