Plasma method for coating the inside surface of a glass tube
US4473596A · kind A · utility
31Cited by
5References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 8, 1983 |
| Grant date | Sep 25, 1984 |
| Priority date | — |
| Expiry date | Feb 8, 2003 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03B37/01846
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
A method of making optical fibers by plasma chemical vapor deposition (PCVD) is disclosed wherein the pressure in the glass tube is maintained constant by controlling the rate of evacuation. The pressure-dependent controlled variable is preferably the impedance of the plasma-producing device, and the rate of evacuation is controlled in such a way that this impedance remains constant.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.