Semiconductor structure for a fiber optical pressure sensing element
US4473747A · kind A · utility
12Cited by
4References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 4, 1981 |
| Grant date | Sep 25, 1984 |
| Priority date | — |
| Expiry date | Nov 4, 2001 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L1/24
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to an optical sensor element of a solid material for sensing physical quantities such as pressure, which element is excitable to emit photoluminescence on excitation which constitutes a measure of the quantity being sensed. The sensor element comprises a diaphragm which consists of at least two layers applied to an apertured substrate, at least one of which layers has luminescent properties. The luminescence may be sensed by means of at least one optical fiber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.