Ion induced thin surface coating
US4474827A · kind A · utility
17Cited by
5References
6Claims
0Family size
Inventor
Key dates
| Filing date | Jul 8, 1982 |
| Grant date | Oct 2, 1984 |
| Priority date | — |
| Expiry date | Jul 8, 2002 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/48
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Thin film coatings comprising hydrocarbon polymers are deposited on and merged into a substrate by causing secondary ionically activated and electric field energized atomic or molecular ionic species including hydrocarbon species to be directed to a substrate in conjunction with an ion beam of primary energetic ions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.