Optical beam homogenizer
US4475027A · kind A · utility
216Cited by
12References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 17, 1981 |
| Grant date | Oct 2, 1984 |
| Priority date | — |
| Expiry date | Nov 17, 2001 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/0927
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical beam homogenizer divides and redirects an incident beam to provide uniform irradiation to a plane surface. The beam homogenizer is particularly useful in an apparatus and method for uniform laser irradiation of materials. The apparatus comprises a laser, a beam homogenizer, and a support for the material being irradiated. Depending on the system parameters, the apparatus is useful for metal hardening, semiconductor annealing, or other materials processing applications.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.