Method and apparatus for a fast internal logic check of integrated circuits

US4477775A · kind A · utility

Assignee

• Siemens Aktiengesellschaft · DE

Inventor

• Peter Fazekas · Munich, DE

Key dates

• Filing date: Dec 23, 1981
• Grant date: Oct 16, 1984
• Expiry date: Dec 23, 2001

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B82Y15/00
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method and apparatus for conducting a fast internal logic check of integrated circuits whereby the operations on all data lines of a data bus can be simultaneously represented employ a pulsed electron beam as a measuring probe, a scan generator for changing the position of the measuring probe, an evaluator for the potential-contrast signal, a computer or logic analyzer for evaluating the measured values, and a sequence control device for controlling the sequence of operation of the method and device. Given a fixed phase relation of the program cycle of the integrated circuit to be checked, the pulsed electron beam is successively directed to different test locations and the potential-contrast signal for each test location is registered and logically evaluated. The test results gained at the various phase relations are relayed to the logic analyzer and evaluated therein.