Flow sensor
US4478077A · kind A · utility
243Cited by
13References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 30, 1982 |
| Grant date | Oct 23, 1984 |
| Priority date | — |
| Expiry date | Sep 30, 2002 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/699
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A flow sensor comprising a pair of thin film heat sensors and a thin film heater is disclosed. The flow sensor further comprises a semiconductor body with a depression therein and structure connecting the heater and the sensors to the body and bridging the depression so that at least a major portion of the heater and the sensors are out of contact with the body. The sensors are disposed on opposite sides of the heater, the structure connecting comprising two thin film members bridging the depression, each member comprising one sensor and a portion of the heater.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.