Amorphous silicon carbide method
US4478654A · kind A · utility
7Cited by
6References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 7, 1982 |
| Grant date | Oct 23, 1984 |
| Priority date | — |
| Expiry date | Jan 7, 2002 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/931
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Preparation of amorphous semiconductor carbides that are suitable for use in a wide variety of devices by the pyrolytic decomposition of a mixture of one or more semiconductanes and one or more carbanes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.