Electrostatic chuck plate
US4480284A · kind A · utility
407Cited by
3References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 29, 1982 |
| Grant date | Oct 30, 1984 |
| Priority date | — |
| Expiry date | Sep 29, 2002 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6833
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An electrostatic chuck plate comprises an electrode plate made of electrically conductive material and a dielectric layer formed on one surface of the electrode plate by flame-spraying dielectric material. The surface region of the dielectric layer is impregnated with plastic material, and the surface of the dielectric layer is smooth and flat. A sample is electrostatically attracted toward the electrode plate and is thus held on the smooth and flat surface of the dielectric layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.