Scanning capacitance microscope
US4481616A · kind A · utility
39Cited by
6References
21Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 30, 1981 |
| Grant date | Nov 6, 1984 |
| Priority date | — |
| Expiry date | Sep 30, 2001 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/866
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Variations in topography and material properties of the surface layer of a body are observed in microscopic imaging using a scanning capacitance probe. The acronym SCaM identifying the process and apparatus is derived from the phrase scanning capacitance microscope. The material properties observable by SCaM are the surface-electric property representative of the complex dielectric constant of the surface material and the surface-mechanical property representative of the elastic constant of the surface material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.